20 June 2012 Fabrication of nanoresonator biosensing arrays using nanoimprint lithography
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J. of Micro/Nanolithography, MEMS, and MOEMS, 11(2), 023013 (2012). doi:10.1117/1.JMM.11.2.023013
Nanoimprint lithography was used to fabricate arrays of SiCN nanoscale resonators for biological analysis applications. A bilayer resist consisting of PMMA 495/LOR 3A allowed high fabrication yields for resonators of widths ranging from 120 to 300 nm, thicknesses of 40 and 70 nm, and a length of 14 μm. To our knowledge, these 120 nm resonators are the narrowest suspended structures ever fabricated via nanoimprinting. Device to device uniformity of resonant frequency was dictated by the uniformity of the tensile stress over the device layer. The 40 nm thick and 70 nm thick devices showed average resonant frequencies of 16.6±2  MHz, and 21.7±0.3  MHz, respectively. These devices were successfully employed as elements of arrays for the detection of a biological analyte. The biotin-streptavidin system was used for such purpose. The specific capture of streptavidin induced downward frequency shifts ranging from 100 to 300 kHz, corresponding to capture densities of roughly 1 to 5 molecules per 100  nm2. Negative control experiments showed no net downward frequency shifts, demonstrating the specificity of the detection.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE)
Alex Janzen, Sommayyeh Poshtiban, Amit Singh, Stephane Evoy, "Fabrication of nanoresonator biosensing arrays using nanoimprint lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 023013 (20 June 2012). https://doi.org/10.1117/1.JMM.11.2.023013

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