Special Section Guest Editorial: Directed Self-Assembly

Daniel P. Sanders

doi:10.1117/1.JMM.11.3.031301

9 August 2012 Special Section Guest Editorial: Directed Self-Assembly

Daniel P. Sanders

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 3, 031301 (August 2012). https://doi.org/10.1117/1.JMM.11.3.031301

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Daniel P. Sanders "Special Section Guest Editorial: Directed Self-Assembly," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(3), 031301 (9 August 2012). https://doi.org/10.1117/1.JMM.11.3.031301

Published: 9 August 2012

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KEYWORDS

Directed self assembly

Electron beam lithography

Lithography

Etching

Nanotechnology

Plasma etching

Nanofabrication

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