Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester

Moonkeun Kim; Beomseok Hwang; Yong-Hyun Ham; Jaehwa Jeong; Nam-Ki Min; Kwang-Ho Kwon

doi:10.1117/1.JMM.11.3.033009

20 September 2012 Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester

Moonkeun Kim, Beomseok Hwang, Yong-Hyun Ham, Jaehwa Jeong, Nam-Ki Min, Kwang-Ho Kwon

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 3, 033009 (September 2012). https://doi.org/10.1117/1.JMM.11.3.033009

Abstract

We compare the performances of vibration-powered microelectromechanical system (MEMS) electrical generators using a Pb(Zr,Ti)O₃ (PZT) material. With the aid of a finite element method simulation, we have designed a PZT cantilever-based energy-harvesting system that uses mechanical vibration. We fabricate cantilevers on the MEMS scale with an integrated variable Si proof mass to obtain a low resonant frequency and high current. Based on simulation results, we fabricate cantilever devices with integrated Si proof masses with volumes of about 0.32 and 0.53 mm ³. These devices compare favorably to the data obtained through simulation. Further, by comparing variable mass volumes, we obtain a high current and low resonant frequency. Similar results are obtained by simulation and experiment. Therefore, we offer a new and predictable means of obtaining a low resonant frequency for application to a micropower source area. Furthermore, from the size effect of the proof mass volume, we obtain the current and resonant frequency of these energy harvester systems. The possibility of a MEMS-scale power source for energy conversion experiments is also tested.

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Moonkeun Kim, Beomseok Hwang, Yong-Hyun Ham, Jaehwa Jeong, Nam-Ki Min, and Kwang-Ho Kwon "Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(3), 033009 (20 September 2012). https://doi.org/10.1117/1.JMM.11.3.033009

Published: 20 September 2012

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