12 October 2012 Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 11(4), 043006 (2012). doi:10.1117/1.JMM.11.4.043006
Micro-optoelectromechanical systems (MOEMS) deformable mirrors are being developed for focus control in miniature optical systems including endoscopic microscopes and small form-factor camera lenses. A new process is described to create membrane mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration, are described. Multiple actuation electrodes allow active control of more than 1.4 μm peak-to-peak of wavefront spherical aberration. The MOEMS mirror is demonstrated in a confocal microscope in which it provides focus control during capture of in vivo images.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE)
Mohammad J. Moghimi, Chris R. Wilson, David L. Dickensheets, "Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(4), 043006 (12 October 2012). https://doi.org/10.1117/1.JMM.11.4.043006

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