2 January 2013 Development of microthermoelectric generators using integrated suspending bridge-type polysilicon thin-film thermopiles
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Abstract
We describe the development of novel suspension bridge-type microthermoelectric generators (μ -TEGs) having 64,000 to 147,000 serial-connected thermocouples in a 1-centimeter-square chip area using surface micromachining techniques. Each microthermocouple is constructed by a pair of n/p bridge-type polysilicon thin-film thermolegs and a pair of cold- and hot-side Cr/Au metal planes. Under a controlled fixed temperature difference between the cold/hot sides, the open-circuit voltage and the output power of the proposed μ -TEGs are simulated by commercial software (ANSYS). The influences of thermocouple thermo-leg dimensions and number of thermocouples on the thermoelectric characteristics of presented μ -TEGs are investigated. The implemented suspension bridge-type thermopile has a 2.5-μm-height air-gap separation from substrate and its fabrication yield is higher than 75% in the laboratory environment. The measured maximum temperature difference between the cold/hot sides of the proposed μ -TEGs is about 1.29°C, a maximum open-circuit voltage of 4.64  V/cm 2 and output power of 0.65  μW/cm 2 can be obtained.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
I-Yu Huang, I-Yu Huang, Guan-Ming Chen, Guan-Ming Chen, Ting-Yi Wu, Ting-Yi Wu, } "Development of microthermoelectric generators using integrated suspending bridge-type polysilicon thin-film thermopiles," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013001 (2 January 2013). https://doi.org/10.1117/1.JMM.12.1.013001 . Submission:
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