6 February 2013 Modeling the effects of pupil-manipulated spherical aberration in optical nanolithography
Author Affiliations +
Abstract
An aerial image model is used to study the effects of spherical aberration applied in the lens pupil domain of a lithography projection scanner. These effects include the illumination dependency of focus exposure matrix tilt and the linear relationship between primary and higher order spherical coefficients on best focus (BF). Experimental data trends of BF through pitch and orientation have been replicated by an analytical expression. This computationally efficient formulation has the capability to provide corrective spherical aberration coefficients, which decrease the pitch-dependent BF and increase process latitude.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
Monica Kempsell Sears, Bruce W. Smith, "Modeling the effects of pupil-manipulated spherical aberration in optical nanolithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013008 (6 February 2013). https://doi.org/10.1117/1.JMM.12.1.013008 . Submission:
JOURNAL ARTICLE
8 PAGES


SHARE
Back to Top