12 June 2013 Light confinement effect of nonspherical nanoscale solid immersion lenses
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We report on the light confinement effect observed in nonideally shaped (i.e., nonspherical) nanoscale solid immersion lenses (SIL). To investigate this effect, nanostructures of various shapes are fabricated by electron-beam lithography. When completely melted in reflow, these noncircular pillars become spherical, while incomplete melting results in nonspherically shaped SILs. Optical characterization shows that nonideal SILs exhibit a spot size reduction comparable with that of spherical SILs. When the size of the SIL is of wavelength scale or smaller, aberrations are negligible due to the short optical path length. This insensitivity to minor variations in the shape implies a large tolerance in nano-SIL fabrication.
© The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Myun-Sik Kim, Myun-Sik Kim, Toralf Scharf, Toralf Scharf, David Nguyen, David Nguyen, Ethan Keeler, Ethan Keeler, Skyler Rydberg, Skyler Rydberg, Wataru Nakagawa, Wataru Nakagawa, Gaël D. Osowiecki, Gaël D. Osowiecki, Reinhard Voelkel, Reinhard Voelkel, Hans Peter Herzig, Hans Peter Herzig, } "Light confinement effect of nonspherical nanoscale solid immersion lenses," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(2), 023015 (12 June 2013). https://doi.org/10.1117/1.JMM.12.2.023015 . Submission:

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