Thermally controlled alignment for wafer-scale lithography

Euclid E. Moon; Saurabh A. Chandorkar; S. V. Sreenivasan; R. Fabian Pease

doi:10.1117/1.JMM.12.3.031109

28 August 2013 Thermally controlled alignment for wafer-scale lithography

Euclid E. Moon; Saurabh A. Chandorkar; S. V. Sreenivasan; R. Fabian Pease

Author Affiliations +

J. of Micro/Nanolithography, MEMS, and MOEMS, 12(3), 031109 (2013). https://doi.org/10.1117/1.JMM.12.3.031109

Abstract

A primary limitation in nanoimprint lithography is lack of alignment consistency between multiple fields. Simultaneous imprinting of several fields is highly desirable for enhanced throughput, yet placement errors in template fabrication and other factors limit field-to-field accuracy. Here, we describe a method to improve overlay simultaneously across many fields via continuous, in situ control of localized temperature distributions. In this method, interferometric moiré alignment signals from an array of microscopes are analyzed to form a map of distortion and control the distribution of heat in real time. Thermal cross-talk between fields is minimized using a microchannel wafer chuck. We demonstrate simultaneous operation of feedback loops that stabilize alignment over a 100-mm span to 0.5 nm (3σ).

Citation Download Citation

Euclid E. Moon, Euclid E. Moon, Saurabh A. Chandorkar, Saurabh A. Chandorkar, S. V. Sreenivasan, S. V. Sreenivasan, R. Fabian Pease, R. Fabian Pease, } "Thermally controlled alignment for wafer-scale lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(3), 031109 (28 August 2013). https://doi.org/10.1117/1.JMM.12.3.031109 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years