5 September 2013 Precuring implant photoresists for shrink and patterning control
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193-nm compatible photoresists are turning out to be the new platform for implant lithography, due to the increasing requirements in both resolution and overlay. Shrinkage of such resists is becoming progressively the most topical issue for aggressive nodes, where conventional pretreatments from older resist platforms, such as ultraviolet flood exposures, are not directly transferable to (meth-)acrylate-type resists. The precuring options available for state-of-the-art implant photoresists for 193-nm lithography is explored, in which we target to reduce the shrinkage during implantation for trenching critical dimensions (CDs) that are relevant for nodes <;20  nm . An extensive study comprising different approaches, including laser-, ion-, and electron-based treatments, is presented. Each treatment is individually investigated with the aim to find not only a valid pretreatment for shrinkage control during implantation, but also to understand what effect alternative pretreatments have on the morphology and the CDs of thick photoresists used as implant stopping layers. Viable options for further process optimization in order to integrate them into device process flows are found. To this extent, the shrink behavior after pretreatment is shown, and the additional shrink dynamics after implantation are compared.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
Gustaf Winroth, Gustaf Winroth, Erik Rosseel, Erik Rosseel, Christie Delvaux, Christie Delvaux, Efrain A. Sanchez, Efrain A. Sanchez, Monique Ercken, Monique Ercken, } "Precuring implant photoresists for shrink and patterning control," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(4), 041303 (5 September 2013). https://doi.org/10.1117/1.JMM.12.4.041303 . Submission:

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