Metrology needs for through-silicon via fabrication

Victor H. Vartanian; Richard A. Allen; Larry Smith; Klaus Hummler; Steve Olson; Brian C. Sapp

doi:10.1117/1.JMM.13.1.011206

27 February 2014 Metrology needs for through-silicon via fabrication

Victor H. Vartanian, Richard A. Allen, Larry Smith, Klaus Hummler, Steve Olson, Brian C. Sapp

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 1, 011206 (February 2014). https://doi.org/10.1117/1.JMM.13.1.011206

Abstract

This paper focuses on the metrology needs and challenges of through-silicon via (TSV) fabrication, consisting of TSV etch, liner, barrier, and seed (L/B/S) depositions, copper plating, and copper chemical mechanical planarization. These TSVs, with typical dimensions within a factor of two or so of ≈5 μm ×50 μm (diameter×depth ), present an innovative set of metrology challenges because of the high aspect ratio and large feature sizes. The metallization deposition process includes thin layers of L/B/S metal; metrology for these layers determines whether there is complete coverage of the sidewalls. Metrology for the fill step includes verifying that the TSVs are deposited without voids and that the extent of stress on the surrounding silicon does not exceed acceptable limits.

Citation Download Citation

Victor H. Vartanian, Richard A. Allen, Larry Smith, Klaus Hummler, Steve Olson, and Brian C. Sapp "Metrology needs for through-silicon via fabrication," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 011206 (27 February 2014). https://doi.org/10.1117/1.JMM.13.1.011206

Published: 27 February 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available