Hybrid metrology: from the lab into the fab

Alok Vaid; Alexander Elia; Givantha Iddawela; Cornel Bozdog; Matthew J. Sendelbach; Byungcheol Kang; Paul K. Isbester; Shay Wolfling

doi:10.1117/1.JMM.13.4.041410

6 November 2014 Hybrid metrology: from the lab into the fab

Alok Vaid, Alexander Elia, Givantha Iddawela, Cornel Bozdog, Matthew J. Sendelbach, Byungcheol Kang, Paul K. Isbester, Shay Wolfling

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 4, 041410 (November 2014). https://doi.org/10.1117/1.JMM.13.4.041410

Abstract

The accelerated pace of the semiconductor industry in recent years is putting a strain on existing dimensional metrology equipment (such as critical dimension-secondary electron microscopy, atomic force microscopy, scatterometry) to keep up with ever-increasing metrology challenges. However, a revolution appears to be forming with the recent advent of hybrid metrology (HM). We highlight some of the challenges and lessons learned when setting up a standard HM solution and describe the first-in-industry implementation of HM within a high-volume manufacturing environment.

Citation Download Citation

Alok Vaid, Alexander Elia, Givantha Iddawela, Cornel Bozdog, Matthew J. Sendelbach, Byungcheol Kang, Paul K. Isbester, and Shay Wolfling "Hybrid metrology: from the lab into the fab," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 041410 (6 November 2014). https://doi.org/10.1117/1.JMM.13.4.041410

Published: 6 November 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available