Efficient source mask optimization using multipole source representation

Chaoxing Yang; Sikun Li; Xiangzhao Wang

doi:10.1117/1.JMM.13.4.043001

2 October 2014 Efficient source mask optimization using multipole source representation

Chaoxing Yang, Sikun Li, Xiangzhao Wang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 4, 043001 (October 2014). https://doi.org/10.1117/1.JMM.13.4.043001

Abstract

Source mask optimization (SMO) is one of the required techniques for lithography below 32 nm. Source representation is one important factor that affects both the imaging simulation and optimization processes of SMO, especially the global SMOs such as the SMO using genetic algorithm (GA-SMO). We propose a source representation which accelerates the GA-SMO. The proposed representation uses a group of circular poles to describe the freeform illumination source whose pupil filling ratio (PFR) is small. Compared with conventional Cartesian-grid and polar-grid pixelated representations, the proposed multipole source representation can represent the low-PFR freeform illumination source with fewer variables, which speeds up both the GA convergence and lithography imaging simulation. Numerical experiments show that the GA-SMO using the proposed multipole source representation method is about seven times faster than that using polar-grid pixelated source representation on the premise that other simulation conditions are the same and optimization qualities are comparable.

Citation Download Citation

Chaoxing Yang, Sikun Li, and Xiangzhao Wang "Efficient source mask optimization using multipole source representation," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 043001 (2 October 2014). https://doi.org/10.1117/1.JMM.13.4.043001

Published: 2 October 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available