20 February 2014 Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 13(1), 011114 (2014). doi:10.1117/1.JMM.13.1.011114
This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Large quasistatic deflections of ±10  deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. This mirror is 2.6×3.6  mm and operates at 1600 Hz with an 80-deg optical scan range. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array—consisting of five hybrid assembled MEMS devices—is used in an innovative 3-D ToF laser scanner. This enables a distance measuring rate of 1 MVoxel/s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Richard Schroedter, Harald Schenk, "Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 011114 (20 February 2014). https://doi.org/10.1117/1.JMM.13.1.011114


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