15 September 2014 SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications
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J. of Micro/Nanolithography, MEMS, and MOEMS, 13(3), 030501 (2014). doi:10.1117/1.JMM.13.3.030501
Abstract
We describe a method for fabricating an aperture on a fluidic cantilever device using SU-8 as a structural material. The device can ultimately be used for patch clamping, microinjections, fluidic delivery, fluidic deposition, and micromaterial removal. In the first generation of this device, the initial aperture diameter is 10  μm and is fabricated on a silicon-on-insulator (SOI) wafer that is structurally used to define the aperture. The aperture can be reduced in size through mask design. This self-aligned process allows for patterning on the sharp tip projecting out of the fluidic plane on the cantilever and is batch fabricated, reducing the cost and time for manufacture. The initial mask, SOI device layer thickness, and the width of the base of the tip define the size of the aperture. The SU-8 micromachined cantilever includes an electrode and a force sensing mechanism. The cantilever can be easily integrated with an atomic force microscope or an optical microscope.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Angelo Gaitas, Robert W. Hower, "SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(3), 030501 (15 September 2014). http://dx.doi.org/10.1117/1.JMM.13.3.030501
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KEYWORDS
Microfluidics

Electrodes

Silicon

Semiconducting wafers

Etching

Oxides

Resistance

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