6 November 2014 Fabrication of micropressure sensor using SU-8/silver as piezoresistor and overhead projector transparency as substrate
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Abstract
This paper proposes a low-cost SU-8 pressure sensor fabricated using a piezoresistive material, SU-8/silver composite (SU-8/Ag), and a substrate material, overhead projector (OHP) transparency. SU-8/Ag has higher gauge factor (26.3) but shows a lower stiffness (2 GPa) compared with doped silicon. The OHP transparency substrate is cheap, easily forms the desired shape, is transparent to light (allows backside exposure), and allows for the dry release method through OHP transparency. Fabrication and characterization in this study were carried out using a typical semiconductor lab setup. The fabricated sensor showed high sensitivity (21.5  μV/Pa), low linearity error (Pearson’s correlation coefficient=0.994937), and no apparent hysteresis response. The fabricated sensor with SU-8/Ag as the piezoresistive material exhibited 41 times higher sensitivity compared to that found in a previous study based on SU-8 and doped polysilicon.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Wah Seng Wong, Wah Seng Wong, Ishak Abdul Azid, Ishak Abdul Azid, Kamarulazizi Ibrahim, Kamarulazizi Ibrahim, Mutharasu Devarajan, Mutharasu Devarajan, } "Fabrication of micropressure sensor using SU-8/silver as piezoresistor and overhead projector transparency as substrate," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 043009 (6 November 2014). https://doi.org/10.1117/1.JMM.13.4.043009 . Submission:
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