18 December 2014 Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 13(4), 043019 (2014). doi:10.1117/1.JMM.13.4.043019
This work reports on mechanical tests and irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20,000 under vacuum. The susceptibility of the devices to radiation-induced degradation was investigated using 60Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. In addition, the device characteristics were evaluated after mechanical shock and vibration tests and only small effects on the devices were observed. In all experiments, no significant changes of the resonance characteristics were observed within the experimental uncertainty, which was below 100 ppm for the resonance frequency. The results support the efforts toward design and fabrication of highly reliable MEMS devices for space applications.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Tobias Bandi, Jacek Baborowski, Alex Dommann, Herbert R. Shea, Francis Cardot, Antonia Neels, "Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 043019 (18 December 2014). https://doi.org/10.1117/1.JMM.13.4.043019



Microelectromechanical systems

Aluminum nitride


Radiation effects


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