13 November 2014 In situ aberration measurement method using a phase-shift ring mask
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© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Sikun Li, Xiangzhao Wang, Jishuo Yang, Lifeng Duan, Feng Tang, Guanyong Yan, "In situ aberration measurement method using a phase-shift ring mask," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 011005 (13 November 2014). https://doi.org/10.1117/1.JMM.14.1.011005
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