13 November 2014 In situ aberration measurement method using a phase-shift ring mask
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© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Sikun Li, Sikun Li, Xiangzhao Wang, Xiangzhao Wang, Jishuo Yang, Jishuo Yang, Lifeng Duan, Lifeng Duan, Feng Tang, Feng Tang, Guanyong Yan, Guanyong Yan, "In situ aberration measurement method using a phase-shift ring mask," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 011005 (13 November 2014). https://doi.org/10.1117/1.JMM.14.1.011005 . Submission:
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