For the past four decades, cost and features have driven complementary metal-oxide semiconductor (CMOS) scaling. Severe lithography and material limitations seen below the 20-nm node, however, are challenging the fundamental premise of affordable CMOS scaling. Just continuing to co-optimize leaf cell circuit and layout designs with process technology does not enable us to exploit the challenges of sub-20-nm CMOS. For affordable scaling, it is imperative to work past sub-20-nm technology impediments while exploiting its features. To this end, we propose to broaden the scope of design technology co-optimization (DTCO) to be more holistic by including microarchitecture design and computer-aided design, along with circuits, layout, and process technology. Furthermore, we undertook such a holistic DTCO for all critical design elements such as embedded memory, standard cell logic, analog components, and physical synthesis in a 14-nm process. Measurements results from experimental designs in a representative 14-nm process from IBM demonstrate the efficacy of the proposed approach.