6 January 2015 Computational study of directed self-assembly for contact-hole shrink and multiplication
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Abstract
We use three-dimensional self-consistent field theory (SCFT) to study the directed self-assembly (DSA) of cylinder-forming block copolymers in a peanut-shaped (also called egg-box) prepattern. The design of the prepattern shape will target the pitch reduction of the contact holes. The idea is that the DSA of block copolymers will not only lead to reduced critical dimensions relative to the template but will also repair defects in the guiding prepatterns and produce defect-free contact holes. We also study blends of block copolymers and homopolymers with various lengths and volume fractions. Using SCFT simulations, we establish the effects of the added homopolymer on defectivity, the process window, and the properties of the formed cylinders. In an attempt to quantify the effect of thermal fluctuations on the placement of the cylinders, we resort to complex Langevin simulations and perform a stochastic sampling of the assembled morphologies.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Tatsuhiro Iwama, Tatsuhiro Iwama, Nabil Laachi, Nabil Laachi, Kris T. Delaney, Kris T. Delaney, Glenn H. Fredrickson, Glenn H. Fredrickson, } "Computational study of directed self-assembly for contact-hole shrink and multiplication," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 013501 (6 January 2015). https://doi.org/10.1117/1.JMM.14.1.013501 . Submission:
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