18 May 2015 Optimizing the response time of Ni-based resistive temperature detectors
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Resistive temperature detectors (RTDs) are widely used to monitor and control the temperature of work environments due to their higher sensitivity, excellent reliability and stability, and very linear output signal compared to other types of temperature detectors. However, RTDs have some shortcomings, including a slow response time. A nickel-based RTDs were designed, fabricated, and characterized in order to achieve faster response times. We used micromachining processes to analyze devices with different resistor thicknesses, distances between resistor lines, and resistor line widths. The response times of the RTDs were measured to be between 7.5104 and 23.4583 s. From these measurement data, we can conclude that thinner RTDs with larger surface areas show improved response times.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Deok Su Kim, Deok Su Kim, Kyo Sang Choi, Kyo Sang Choi, Hee Jun Yang, Hee Jun Yang, Min Soo Ryu, Min Soo Ryu, Ji Sung Chae, Ji Sung Chae, Sung Pil Chang, Sung Pil Chang, } "Optimizing the response time of Ni-based resistive temperature detectors," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025002 (18 May 2015). https://doi.org/10.1117/1.JMM.14.2.025002 . Submission:


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