5 June 2015 Fabrication and reliability study of a double spiral platinum-based MEMS hotplate
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Abstract
A MEMS hotplate consisting of a double spiral platinum-based element was designed and simulated using MEMS-CAD tool COVENTORWARE. A platinum resistor of 115  Ω was fabricated on a 0.6  μm-thickSiO2 membrane of size 120  μm×120  μm. The hotplate consumes 54 mW when heated up to 756°C. The temperature coefficient of resistance of platinum was measured and found to be 2.19×10−3/°C. The fabrication and reliability testing of the hotplate are described. The test results show that the hotplate can continuously operate at 580°C for 5.5 h and it can sustain at least 60 cycles of pulse-mode operation at 530°C with very low temperature and resistance drifts. The maximum current capability of the hotplate was found to be 13.4 mA without any damage to the structure.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Mahanth Prasad, Dhairya Singh Arya, Vinod Kumar Khanna, "Fabrication and reliability study of a double spiral platinum-based MEMS hotplate," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025003 (5 June 2015). https://doi.org/10.1117/1.JMM.14.2.025003 . Submission:
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