6 April 2015 Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter
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Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal–insulator–metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65  μm using 7VDC actuation voltage.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Kareem Khirallah, Mohamed A. Swillam, "Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025501 (6 April 2015). https://doi.org/10.1117/1.JMM.14.2.025501 . Submission:

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