6 April 2015 Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter
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Abstract
Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal–insulator–metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65  μm using 7VDC actuation voltage.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Kareem Khirallah, Kareem Khirallah, Mohamed A. Swillam, Mohamed A. Swillam, } "Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025501 (6 April 2015). https://doi.org/10.1117/1.JMM.14.2.025501 . Submission:
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