25 September 2015 Bonding of copper surface in ambient air using propylene carbonate as passivation layer
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Abstract
Bonding of a copper surface in a nonvacuum environment has been studied for the purpose of reducing manufacturing costs. Cu-Cu bonding in ambient air is demonstrated by using propylene carbonate (PPC) as a passivation layer. The decomposition of the PPC passivation layer during bonding would protect the copper surface from oxidation by providing a shielding gas atmosphere between the copper surface and the air. Further, the PPC passivation layer would also overcome the degradation of copper surface during storage in the atmosphere.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Zhiyuan Zhu, Min Yu, Oluwadamilola Phillips, Lisha Liu, Yufeng Jin, "Bonding of copper surface in ambient air using propylene carbonate as passivation layer," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 034504 (25 September 2015). https://doi.org/10.1117/1.JMM.14.3.034504 . Submission:
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