3 September 2015 Design and fabrication of a reduced stiction radio frequency MEMS switch
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Abstract
The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46  μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070) mm2. Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch.
© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, Kamaljit Rangra, "Design and fabrication of a reduced stiction radio frequency MEMS switch," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 035002 (3 September 2015). https://doi.org/10.1117/1.JMM.14.3.035002 . Submission:
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