Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation

Frank Yang; Mao-Yen Chang; Zung-Hua Yang; Chih-Ciao Teng; Long-Sheng Fan

doi:10.1117/1.JMM.15.1.015002

11 March 2016 Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation

Frank Yang, Mao-Yen Chang, Zung-Hua Yang, Chih-Ciao Teng, Long-Sheng Fan

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 1, 015002 (March 2016). https://doi.org/10.1117/1.JMM.15.1.015002

Abstract

To assess the charge-injection capacity of the sputtered iridium oxide film (SIROF) electrode on the retinal CMOS image sensor (CIS) chip, a polyimide-based flex device was designed and fabricated to package the retinal CIS chip. The polyimide-flex-based packaging process keeps the surface of photosensors clean, and the measured connection resistance meets the packaging requirement of the low-power retinal CIS chip. The in vitro experimental results show that the small SIROF electrodes can provide a biphasic charge injection per phase of 3.9 nC/ph to achieve the stimulation threshold at a polarization potential of −0.44 V.

Citation Download Citation

Frank Yang, Mao-Yen Chang, Zung-Hua Yang, Chih-Ciao Teng, and Long-Sheng Fan "Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(1), 015002 (11 March 2016). https://doi.org/10.1117/1.JMM.15.1.015002

Published: 11 March 2016

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