Simple integration process of single-layer nanowire gratings for polarization navigation sensor

Ran Zhang; Jinkui Chu; Ze Liu; Yinlong Wang

doi:10.1117/1.JMM.15.3.034501

8 July 2016 Simple integration process of single-layer nanowire gratings for polarization navigation sensor

Ran Zhang, Jinkui Chu, Ze Liu, Yinlong Wang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 3, 034501 (July 2016). https://doi.org/10.1117/1.JMM.15.3.034501

Abstract

A simple integration process of single-layer nanowire gratings (SLNGs) for polarization navigation sensor is proposed. The adaptive capacity of the nanoimprint process on uneven substrate is realized using compressed air and the flexible mold. The plasma ashing process is used to simplify the conventional SLNGs fabrication process. Based on the work mentioned above, six SLNGs areas with 1.3 mm×1.3 mm and six different directions are successfully integrated into a polarization sensitive structure applied to a polarization navigation sensor. The measurement result of quantum efficiency shows good sensitivity, and the angle of polarization measurement error is <±0.1 deg. The experiment result shows that the proposed process is applicable for the integration of large-area single-layer nanometal patterns.

Citation Download Citation

Ran Zhang, Jinkui Chu, Ze Liu, and Yinlong Wang "Simple integration process of single-layer nanowire gratings for polarization navigation sensor," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(3), 034501 (8 July 2016). https://doi.org/10.1117/1.JMM.15.3.034501

Published: 8 July 2016

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