Reliability testing of Ni-Fe as structural material in MEMS gyroscope

Ankush Jain; Ram Gopal

doi:10.1117/1.JMM.15.4.040501

30 December 2016 Reliability testing of Ni-Fe as structural material in MEMS gyroscope

Ankush Jain, Ram Gopal

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 4, 040501 (December 2016). https://doi.org/10.1117/1.JMM.15.4.040501

Abstract

We report reliability testing results for Ni-Fe when used as a structural material in a MEMS gyroscope. The tests are performed on a 2-degree-of-freedom torsional gyroscope fabricated by an SU-8-based ultraviolet-lithographie, galvanoformung, abformung process having 8-μm-thick Ni-Fe as the structural layer. The device is vacuum packaged in a 24-pin dual in-line package with a glass lid before measuring its frequency response and extracting the mode shapes using laser Doppler vibrometer. To check the reliability of the Ni-Fe structural layer, three types of tests, fatigue, shock, and vibration, are conducted. In fatigue testing, the packaged device is excited at its resonance frequency for more than a billion cycles, and it is checked periodically for any physical damage or change in the resonance frequency. The shock test is performed by dropping the device chip on a hard surface floor from 1 m height. The vibration test is carried out by subjecting the packaged device to more than 4g acceleration having frequency of 200 Hz for 30 min.

Citation Download Citation

Ankush Jain and Ram Gopal "Reliability testing of Ni-Fe as structural material in MEMS gyroscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 040501 (30 December 2016). https://doi.org/10.1117/1.JMM.15.4.040501

Received: 9 September 2016; Accepted: 12 December 2016; Published: 30 December 2016

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KEYWORDS

Gyroscopes

Reliability

Microelectromechanical systems

Laser Doppler velocimetry

Doppler effect

Electrodes

Epoxies

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