1 February 2016 Effect of electron beam irradiation on thin metal films on glass surfaces in a submicrometer scale
Author Affiliations +
Abstract
It is shown experimentally that the irradiation of thin Al and Au films of thickness 50 to 100 nm on a silicate glass surface by electrons results in effects that differ principally depending on the electron energy. For energies of 5 to 15 keV, the irradiation leads to an increase in the film thickness throughout the irradiated zone and a decrease in the thickness in the surrounding area. For an energy of 25 keV, the irradiation leads to dissolving the Au film in glass in the irradiated zone. The mechanisms of the observed effects are discussed.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Filipp E. Komissarenko, Ivan S. Mukhin, Alexander O. Golubok, Nikolay V. Nikonorov, Mikhail A. Prosnikov, Alexander I. Sidorov, "Effect of electron beam irradiation on thin metal films on glass surfaces in a submicrometer scale," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(1), 013502 (1 February 2016). https://doi.org/10.1117/1.JMM.15.1.013502 . Submission:
JOURNAL ARTICLE
7 PAGES


SHARE
Back to Top