11 March 2016 Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation
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Abstract
To assess the charge-injection capacity of the sputtered iridium oxide film (SIROF) electrode on the retinal CMOS image sensor (CIS) chip, a polyimide-based flex device was designed and fabricated to package the retinal CIS chip. The polyimide-flex-based packaging process keeps the surface of photosensors clean, and the measured connection resistance meets the packaging requirement of the low-power retinal CIS chip. The in vitro experimental results show that the small SIROF electrodes can provide a biphasic charge injection per phase of 3.9  nC/ph to achieve the stimulation threshold at a polarization potential of −0.44  V.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Frank Yang, Frank Yang, Mao-Yen Chang, Mao-Yen Chang, Zung-Hua Yang, Zung-Hua Yang, Chih-Ciao Teng, Chih-Ciao Teng, Long-Sheng Fan, Long-Sheng Fan, } "Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(1), 015002 (11 March 2016). https://doi.org/10.1117/1.JMM.15.1.015002 . Submission:
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