29 March 2016 In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs
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Abstract
This work proposes an architecture for a wide-angle, self-aligned, in-plane monolithic scanner fabricated using the deep reactive ion etching technology. The fabricated microscanner provides an optical scanning in-plane angle of about 86 deg and operates at the speed of 2.73 kHz. The scanning is achieved using two synchronized, flat mirrors coupled mechanically to allow for wide-angle scanning and connected through a compliant structure to allow the use of a linear comb actuator. This wide-angle, in-plane scanning opens the door for many applications, especially for handheld optical displays.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Alaa Eldin S. M. Elhady Ahmed, Mohamed A. E. Mahmoud, Diaa A. M. Khalil, "In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(1), 015501 (29 March 2016). https://doi.org/10.1117/1.JMM.15.1.015501 . Submission:
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