22 July 2016 Unified fabrication process for complex gratings
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Abstract
A unified fabrication process was developed for four complex gratings. One period of each grating contains multiple pairs of ridges/grooves, and a ridge is usually composed of diversified materials. The process was suitable not only for mass fabrication but also for a large area. Moreover, with only one mold, four gratings could be obtained at once. Two 12×12  mm2 samples were fabricated for demonstration. Profile uniformity of each sample was confirmed with broadband infrared (2.5 to 25  μm) transmittance spectra. A good agreement between measured and modeling results was observed.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Chi-Chun Ho, Chi-Chun Ho, Jung-San Chen, Jung-San Chen, Chia-Heng Lin, Chia-Heng Lin, Yung-Chun Lee, Yung-Chun Lee, Yu-Bin Chen, Yu-Bin Chen, } "Unified fabrication process for complex gratings," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(3), 034502 (22 July 2016). https://doi.org/10.1117/1.JMM.15.3.034502 . Submission:
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