29 November 2016 MEMS mirror-control algorithm for optical switches
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Abstract
We propose an optical-axis alignment technique with high accuracy and high speed using two microelectromechanical-systems mirrors as optical deflectors. The mirrors are vibrated by small perturbations with two different frequencies, and the angle errors of each mirror are separated accurately by applying discrete Fourier transformation on the waveform of the optical power. The cycle time of correction is 5 ms, and the optical power reaches the optimum level within 15 ms at 30-dB loss.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Naru Nemoto, Joji Yamaguchi, "MEMS mirror-control algorithm for optical switches," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 045003 (29 November 2016). https://doi.org/10.1117/1.JMM.15.4.045003 . Submission:
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