20 December 2016 Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration
Author Affiliations +
Abstract
A multiple moving membrane capacitive micromachined ultrasonic transducer has been developed. This transducer cell structure includes a second flexible plate suspended between the transducer top plate and the fixed bottom electrode. The added plate influences the transducer top plate deflection map and, therefore, the transducer properties. Three series of individual air-coupled, dual deflectable plate transducers and two 1 × 27 element transducer arrays were fabricated using multiuser microelectromechanical systems (MEMS) processes (MUMPs). Each set of transducers included devices with middle plate radii from 22% to 65% of the corresponding transducer top plate radius. The effect of the transducer middle plate configuration has been investigated. Electrical, optical, and acoustic characterizations were conducted and the results were compared with the simulation findings. It was found that the transducer top plate amplitude of vibration is significantly enhanced with a wider middle deflectable plate. The electrical and optical measurement results are shown to be in good agreement with simulation results. The acoustic measurement results indicated a 37% increase in the amplitude of transmitted signal by the 1-MHz air-couple transducer when its middle plate radius was increased by 35%.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Arezoo Emadi, Douglas Buchanan, "Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(4), 045004 (20 December 2016). https://doi.org/10.1117/1.JMM.15.4.045004 . Submission: Received: 24 September 2016; Accepted: 21 November 2016
Received: 24 September 2016; Accepted: 21 November 2016; Published: 20 December 2016
JOURNAL ARTICLE
8 PAGES


SHARE
Back to Top