5 January 2017 Uncertainty in roughness measurements: putting error bars on line-edge roughness
Author Affiliations +
Abstract
Measurement of line-edge or linewidth roughness involves uncertainty, like all measurements, and an estimate of that uncertainty should be reported whenever a roughness measurement is reported. However, roughness measurement uncertainty estimates are complicated by the correlations along the length of the rough feature. As a result, roughness measurements are often not accompanied by uncertainty estimates or error bars on graphs. Here, both theoretical considerations and simulations of random rough features will be used to derive a simple formula to estimate the uncertainty of a roughness measurement using the standard parameters describing that roughness: standard deviation, correlation length, and roughness exponent. Additionally, a more accurate formula to estimate the systematic bias in roughness standard deviation is provided.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Chris A. Mack, Chris A. Mack, "Uncertainty in roughness measurements: putting error bars on line-edge roughness," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(1), 010501 (5 January 2017). https://doi.org/10.1117/1.JMM.16.1.010501 . Submission:
JOURNAL ARTICLE
3 PAGES


SHARE
Back to Top