12 January 2017 Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging
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X-ray differential phase-contrast imaging (DPCI) using a Talbot–Lau interferometer at a conventional tube source has continuously found applications since its first demonstration. It requires high aspect ratio grating structures with a feature size in the micrometer range that are fabricated using lithographie, galvanik und abformung technology. To overcome the current limitation in grating area, an exposure strategy—continuous exposure—has been developed. In this case, the mask is fixed in respect to the synchrotron beam and only the substrate is scanned. Thus, the grating area is given by the scanning length which is much larger than the actual mask size. The design, needs, and tolerances to adopt this process of dynamic exposure will be described. Furthermore, the first tests using this method will be presented. Gratings with a metal aspect ratio of 11 and a period of 10    μ m were fabricated on an area of 165    mm × 65    mm . First imaging results demonstrate the suitability of this method. No differences in the visibility or in x-ray image compared to gratings fabricated by the standard method could be found.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Tobias J. Schröter, Frieder Koch, Pascal Meyer, Martin Baumann, Daniel Münch, Danays Kunka, Sabine Engelhardt, Marcus Zuber, Tilo Baumbach, Jürgen Mohr, "Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(1), 013501 (12 January 2017). https://doi.org/10.1117/1.JMM.16.1.013501 . Submission: Received: 3 November 2016; Accepted: 22 December 2016
Received: 3 November 2016; Accepted: 22 December 2016; Published: 12 January 2017

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