6 January 2017 Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2
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Abstract
A gas sensor based on microelectromechanical systems (MEMS) technology containing a WO 3 sensitive layer was designed, simulated, and fabricated. The gas sensor consists of a silicon substrate, a platinum microheater, gold interdigitated electrodes, and a WO 3 sensitive layer. The active area with dimensions of 0.4    mm × 0.4    mm is located at the center of a sensor ( 3    mm × 3    mm ). The experimental results show that the microheater provided heating for the WO 3 sensitive layer at low power consumption and accurate temperature control. At a power consumption of only 40 mW, the temperature reached 319°C at the center of the MEMS platform with uniform heating. In addition to that, the above mentioned gas sensor exhibited a high response to NO 2 with optimized sensitivity recorded at the working temperature of 170°C. With 10 ppb of NO 2 , the response of the sensor could reach up to 5.8 and the power consumption is 17.2 mW.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Chengyang Wang, Jiandong Jin, Yuling Li, Wenbo Ding, Mingjun Dai, "Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(1), 015002 (6 January 2017). https://doi.org/10.1117/1.JMM.16.1.015002 . Submission: Received: 21 June 2016; Accepted: 12 December 2016
Received: 21 June 2016; Accepted: 12 December 2016; Published: 6 January 2017
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