24 February 2017 SOIMUMPs micromirror scanner and its application in laser line generator
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A SOIMUMPs 1-D rotation micromirror is presented. The micromirror is driven by electrostatic vertical comb-drive actuators to work at resonant mode to scan a laser beam. The residual stress in the metal film coated on the SOI device layer is used to generate vertical offset in the comb-drive actuators with the combs located far from the rotation axis to increase the torque. A concave lens is designed to put after the micromirror to amplify the laser beam scanning angle, as well as to compensate for the curvature of the micromirror. A micromirror-based scanning system is used to build a laser line generator with a continuously adjustable fan angle, which solves the limitation of a fixed fan angle in conventional laser line generators. Prototypes of the micromirror and the laser line generator are fabricated and measured. A driving circuit that can generate a high-voltage square wave driving signal with adjustable amplitude and frequency is designed. All the parts are integrated in a 44    mm × 88    mm × 44    mm box and powered with a single 5-V power supply. The optical scanning angle under 100 V with or without the concave lens is 27 deg and 12 deg, respectively, at a resonant frequency of 900 Hz.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Hui Zuo, Hui Zuo, Farzad Hossein Nia, Farzad Hossein Nia, Siyuan He, Siyuan He, } "SOIMUMPs micromirror scanner and its application in laser line generator," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(1), 015501 (24 February 2017). https://doi.org/10.1117/1.JMM.16.1.015501 . Submission: Received: 29 September 2016; Accepted: 7 February 2017
Received: 29 September 2016; Accepted: 7 February 2017; Published: 24 February 2017

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