30 June 2017 Wafer-scale fabrication of metal nanoring and nanocrescent arrays from nanoimprinted nanopillar arrays
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Abstract
An approach was presented to fabricate wafer-scale nanoring structures based on nanopillar array templates fabricated by nanoimprint lithography. This fabrication method combined UV-curing nanolithography technology, metal deposition, and an etching process, which made it possible to tune the geometric properties of nanorings: height, diameter, and linewidth for various materials, such as Au and Ni. Nanoring arrays showed potential applications in many fields, including memory storage, biosensing, and optical devices. The optical measurement of Au nanorings (
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Congying Fan, Congying Fan, Xuelin Wang, Xuelin Wang, Long Liu, Long Liu, Jian Zhang, Jian Zhang, Yushuang Cui, Yushuang Cui, Peng Zhan, Peng Zhan, Changsheng Yuan, Changsheng Yuan, Haixiong Ge, Haixiong Ge, Zhenlin Wang, Zhenlin Wang, Yanfeng Chen, Yanfeng Chen, } "Wafer-scale fabrication of metal nanoring and nanocrescent arrays from nanoimprinted nanopillar arrays," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(3), 033501 (30 June 2017). https://doi.org/10.1117/1.JMM.16.3.033501 . Submission: Received: 30 April 2017; Accepted: 9 June 2017
Received: 30 April 2017; Accepted: 9 June 2017; Published: 30 June 2017
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