20 July 2017 Doubling the spatial resolution in capacitive tactile sensors
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A capacitive tactile sensor comprising two capacitors was developed to enhance detection by more than doubling the spatial resolution. This arrangement reduced the number of required capacitors from four to two and reconfigured the capacitor shape from square to rectangular, resulting in a symmetric spatial resolution in the x- and y-directions. The theoretical evaluations, simulation predictions, device fabrication, and data analysis conducted in this study yielded identical results. In addition, angle detection errors resulting from fabrication and material uncertainties were comprehensively examined for the first time. The evaluations performed regarding the capacitor configuration further indicated that the sensitivity of shear force detection in this study was optimized with the requirement of a symmetric design.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Mochtar Chandra, Mochtar Chandra, Shi-Yu Ke, Shi-Yu Ke, Rongshun Chen, Rongshun Chen, Cheng-Yao Lo, Cheng-Yao Lo, } "Doubling the spatial resolution in capacitive tactile sensors," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(3), 035001 (20 July 2017). https://doi.org/10.1117/1.JMM.16.3.035001 . Submission: Received: 16 March 2017; Accepted: 27 June 2017
Received: 16 March 2017; Accepted: 27 June 2017; Published: 20 July 2017

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