29 December 2017 Thermo-optical optimization of extreme-ultraviolet pellicles for future generations
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Abstract
The thermo-optical optimization of extreme-ultraviolet pellicles for 3 nm node or smaller is described. Various material and multilayer structure candidates for the optimized pellicles are simulated using a finite element method. The result shows that a silicon-cored pellicle has relatively high transmission, whereas a graphene-cored pellicle shows relatively low stress compared with its material tensile strength.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Eun-Sang Park, Eun-Sang Park, Chung-hyun Ban, Chung-hyun Ban, Jae-Hun Park, Jae-Hun Park, Hye-Keun Oh, Hye-Keun Oh, } "Thermo-optical optimization of extreme-ultraviolet pellicles for future generations," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(4), 041014 (29 December 2017). https://doi.org/10.1117/1.JMM.16.4.041014 . Submission: Received: 29 April 2017; Accepted: 30 November 2017
Received: 29 April 2017; Accepted: 30 November 2017; Published: 29 December 2017
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