27 October 2017 Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns
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Abstract
Chemoepitaxial guidance of block copolymer directed self-assembly in thin films is explored using a coarse-grained molecular dynamics model. The underlayers studied are 2 × density multiplying line-space patterns composed of repeating highly preferential pinning stripes of various widths separated by larger, more neutral, background regions of various compositions. Decreasing the pinning stripe width or making the background region more neutral is found to increase the line edge roughness (LER) of the lines, but these conditions are found to give the straightest sidewalls for the formed lines. Varying these underlayer properties is found to have minimal effect on linewidth roughness. A larger pinning stripe causes the pinned line (PL) to foot (expand near the substrate), and a preferential background region causes the unpinned line (UPL) to undercut (contract near the substrate). A simple model was developed to predict the optimal conditions to eliminate footing. Using this model, conditions are found that decrease footing of the PL, but these conditions increase undercutting in the UPL. Deformations in either the PL or UPL propagate to the other line. There exists a trade-off between LER and the footing/undercutting, that is, decreasing LER increases footing/undercutting and vice versa.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Benjamin D. Nation, Andrew J. Peters, Richard A. Lawson, Peter J. Ludovice, Clifford L. Henderson, "Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(4), 043502 (27 October 2017). https://doi.org/10.1117/1.JMM.16.4.043502 . Submission: Received: 4 May 2017; Accepted: 19 May 2017
Received: 4 May 2017; Accepted: 19 May 2017; Published: 27 October 2017
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