Demodulation phase angle compensation for quadrature error in decoupled dual-mass MEMS gyroscope

Jia Jia; Xukai Ding; Yang Gao; Hongsheng Li

doi:10.1117/1.JMM.17.3.035001

10 July 2018 Demodulation phase angle compensation for quadrature error in decoupled dual-mass MEMS gyroscope

Jia Jia, Xukai Ding, Yang Gao, Hongsheng Li

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue 3, 035001 (July 2018). https://doi.org/10.1117/1.JMM.17.3.035001

Abstract

This paper proposes a demodulation phase angle compensation (DPAC) for dual-mass MEMS gyroscopes with small frequency split (Δω) and low-quality factor (Q value), to reduce the quadrature interference on Coriolis signal output. The harmful contribution of quadrature error and demodulation phase angle drift to the gyroscope performances is analyzed and quantified. The quadrature stiffness correction (QSC) system based on DPAC is redesigned, and it was analyzed that the QSC would reduce the Δω and then affect the performances of the gyroscope. Wherein, the DPAC algorithm is implemented by a back propagation neural network. Finally, the experiments are arranged to verify the theoretical analysis. DPAC experiments were performed for both open-loop detection method and QSC method, respectively, for open-loop detection without DPAC (test 1), open-loop detection with DPAC (test 2), QSC without DPAC (test 3), and QSC with DPAC (test 4). The scale factor results based on these four tests are 15.384, 15.441, 16.652, and 16.731 mV / deg / s, respectively. When tests 2, 3, and 4 are compared to test 1, the bias stability results improved by 88%, 84%, and 97%, and the angle random walk improved by 28%, 23%, and 34%, respectively. Test 4 is proved to be the best type for bias performances, as is the case with a temperature range experiment from 60°C to −40 ° C, but the performances of its scale factor deteriorated. Moreover, the bandwidth is reduced by 4 Hz because of the QSC.

Citation Download Citation

Jia Jia, Xukai Ding, Yang Gao, and Hongsheng Li "Demodulation phase angle compensation for quadrature error in decoupled dual-mass MEMS gyroscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 17(3), 035001 (10 July 2018). https://doi.org/10.1117/1.JMM.17.3.035001

Received: 1 May 2018; Accepted: 11 June 2018; Published: 10 July 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available