Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Yu Zhou; Cyrus Shafai; James Dietrich

doi:10.1117/1.JMM.18.2.025501

20 May 2019 Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Yu Zhou, Cyrus Shafai, James Dietrich

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 2, 025501 (May 2019). https://doi.org/10.1117/1.JMM.18.2.025501

Abstract

A new electrostatic actuator for a double-layer deformable mirror (DM) with continuous phase sheet is presented. The electrostatic actuator employs an upper electrode consisting of multiple Archimedean spiral spring arms supporting a small mass central attachment point and is capable of separating the parameters of actuation voltage, spring constant, and resonance. The feature reduces the complexity in the designing of a double-layer DM with continuous phase sheet, which is widely employed in the adaptive optics area of astronomy. The fabricated device has a diameter of 1250 μm with four single-crystal silicon spiral arms each having a length of 6030 μm, thickness of 15 μm, and width of 30 μm. The actuator was simulated and tested to have a resonant frequency above 2600 Hz and was simulated to be capable of reaching ∼5-μm displacement with a drive voltage of <30 V with an actuator–electrode separation of 15 μm, based on the performance parameter found experimentally.

Citation Download Citation

Yu Zhou, Cyrus Shafai, and James Dietrich "Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(2), 025501 (20 May 2019). https://doi.org/10.1117/1.JMM.18.2.025501

Received: 13 February 2019; Accepted: 29 April 2019; Published: 20 May 2019

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