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5 February 2019 Bioinspired low noise circular-shaped MEMS directional microphone
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Abstract
The traditional state-of-the-art miniature directional microphones suffer from a higher noise level mainly due to size constraints. Herein, a miniature directional microphone mimicking the fly Ormia ochracea’s ear anatomy is presented with the prime focus on achieving higher signal-to-noise ratio at reduced size. The microphone has circular shape with aluminum nitride (AlN)-based piezoelectric readout scheme deposited at the center of the diaphragm. The 3-3 transduction mode is adopted for sensitivity enhancement. The microphone testing is performed in an anechoic chamber. Besides the bidirectional response, the A-weighted noise under broadband excitation is ∼29  dBA, which is lower than the optical directional microphone of Miles et al., which is the most prominent noise analysis work in the area of fly inspired MEMS directional microphone.
© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2019/$25.00 © 2019 SPIE
Asif Ishfaque, Ashiqur Rahaman, and Byungki Kim "Bioinspired low noise circular-shaped MEMS directional microphone," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(1), 010501 (5 February 2019). https://doi.org/10.1117/1.JMM.18.1.010501
Received: 28 September 2018; Accepted: 17 January 2019; Published: 5 February 2019
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