New design for surface micromachined bistable and multistable switches

Ian Foulds; Maria Trinh; Sam Hu; Steven W. Liao; Robert W. Johnstone; M. Parameswaran DUPLICATE RECORD - Do Not U

doi:10.1117/1.1610476

1 October 2003 New design for surface micromachined bistable and multistable switches

Ian Foulds, Maria Trinh, Sam Hu, Steven W. Liao, Robert W. Johnstone, M. Parameswaran DUPLICATE RECORD - Do Not U

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, Issue 4, (October 2003). https://doi.org/10.1117/1.1610476

Abstract

Microsystems often require switches or mechanisms to provide two stable states. In answer to this need, we design a novel micromechanical bistable switch based on the locking mechanism commonly used in extension ladders. This switch was designed and fabricated through the multiuser MEMS processes (MUMPs). Actual performance of the switch was videotaped, analyzed, and compared with theory and simulation. This design was fully functional on the first design iteration, and can easily be extended to provide multiple stable states. We outline the design, simulation, and results from the testing of the microfabricated system.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ian Foulds, Maria Trinh, Sam Hu, Steven W. Liao, Robert W. Johnstone, and M. Parameswaran DUPLICATE RECORD - Do Not U "New design for surface micromachined bistable and multistable switches," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(4), (1 October 2003). https://doi.org/10.1117/1.1610476

Published: 1 October 2003

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