1 October 2003 New design for surface micromachined bistable and multistable switches
Author Affiliations +
Abstract
Microsystems often require switches or mechanisms to provide two stable states. In answer to this need, we design a novel micromechanical bistable switch based on the locking mechanism commonly used in extension ladders. This switch was designed and fabricated through the multiuser MEMS processes (MUMPs). Actual performance of the switch was videotaped, analyzed, and compared with theory and simulation. This design was fully functional on the first design iteration, and can easily be extended to provide multiple stable states. We outline the design, simulation, and results from the testing of the microfabricated system.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Ian Foulds, Maria Trinh, Sam Hu, Steven W. Liao, Robert W. Johnstone, M. Parameswaran DUPLICATE RECORD - Do Not U, "New design for surface micromachined bistable and multistable switches," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(4), (1 October 2003). https://doi.org/10.1117/1.1610476 . Submission:
JOURNAL ARTICLE
4 PAGES


SHARE
RELATED CONTENT

Roles of MEMS optical switches in fiber optic networks ...
Proceedings of SPIE (August 14 2003)
Optical switching technologies for optical routing
Proceedings of SPIE (September 28 2006)
Optical MEMS reliability in space environment
Proceedings of SPIE (April 21 2006)
Photonic MEMS switch applications
Proceedings of SPIE (July 30 2001)

Back to Top