1 October 2003 Replication of micro-optical components by ultraviolet-molding process
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Abstract
An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality to obtain the replicated micro-optical components with the desired properties by accurate control of the shape. We suggest a simple technique to avoid micro air bubbles. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structures are examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 30 and 230 μm were fabricated by the presented method, and the replication quality and the optical properties of the replicated microlens are measured and analyzed.
© (2003) Society of Photo-Optical Instrumentation Engineers (SPIE)
Seok-Min Kim, Seok-Min Kim, Dongmook Kim, Dongmook Kim, Shinill Kang, Shinill Kang, } "Replication of micro-optical components by ultraviolet-molding process," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(4), (1 October 2003). https://doi.org/10.1117/1.1611183 . Submission:
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