Laser-based fabrication of polymer micropump

Joohan Kim; Xianfan Xu

doi:10.1117/1.1631923

1 January 2004 Laser-based fabrication of polymer micropump

Joohan Kim, Xianfan Xu

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 1, (January 2004). https://doi.org/10.1117/1.1631923

Abstract

Diffuser micropumps are commonly fabricated using the standard lithography techniques with silicon as the base material. The important components of this type of micropumps are flow-directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work a polymer is used as the base material instead of silicon. It is demonstrated that polymer-based micropumps can be conveniently fabricated using the laser machining technique. Moreover, because of the flexibility of polymer materials, there is great potential to improve the performance of the polymer micropumps. The fluid flow inside the diffuser polymer micropump is also calculated using computational fluid dynamics methods and the simulated results are compared with the experimental data.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Joohan Kim and Xianfan Xu "Laser-based fabrication of polymer micropump," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(1), (1 January 2004). https://doi.org/10.1117/1.1631923

Published: 1 January 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available